Equipment/Capabilites

High pressure cell enclosed in high vacuum chamber

High pressure flow cell with window

Using this cell we are capable of treating small samples with high pressure fluids. The fluid phase and flow patterns can observed through a sapphire window. The cell is capable of withstanding 3000 psi and 150 ÂșC

High pressure variable volume cell for phase observation

Large volume plasma deposition system (6" wafers)

Large volume high pressure processing chamber for 4" wafers

ALD Reactor

Small volume high pressure cell with in-situ thickness monitoring
 

 

 

Group News

  • Undegraduate research positions available for the Fall 2010.
  • Welcome the two new members to the lab, Lester Li and Michael Casciato.